InhaltsangabeHistorical Background.- Silicon: Child and Progenitor of Revolution.- The Economic Implications of Moore's Law.- State-of-the-Art.- Using Silicon to Understand Silicon.- Theory of Defects in Si: Past, Present, and Challenges.- Structural, Elemental, and Chemical Complex Defects in Silicon and Their Impact on Silicon Devices.- Surface and Interface Chemistry for Gate Stacks on Silicon.- Enhanced Carrier Mobility for Improved CMOS Performance.- Transistor Scaling to the Limit.- Future Directions.- Beyond CMOS Electronics: Self-Assembled Nanostructures.- Hybrid CMOS/Molecular Integrated Circuits.- Sublithographic Architecture: Shifting the Responsibility for Perfection.- Quantum Computing.- Afterwords.- Nano-Whatever: Do We Really Know Where We Are Heading?.- Silicon Forever! Really?.

1. Silicon: Child and Progenitor of Revolution.- 2. The Economic Implications of Moore¿s Law.- 3. Using Silicon to Understand Silicon.- 4. Theory of Defects in Si: Past, Present and Challenges.- 5. Structural, Elemental, and Chemical Complex Defects in Silicon and Their Impact on Silicon Devices.- 6. Surface and Interface Chemistry for Gate Stacks on Silicon.-7. Enhanced Carrier Mobility for Improved CMOS Performance.- 8. Transistor Scaling to The Limit.- 9. Beyond CMOS Electronics: Self-Assembled Nanostructures.- 10. Hybrid CMOS / Molecular Integrated Circuits.- 11. Sublithographic Architecture: Shifting the Responsibility for Perfection.- 12. Quantum Computing.